The Effects of Thermal Processing on Interfacial Microstructure for Thin Multilayered Metal Ohmic Contacts to p+-AlGaAs

The Effects of Thermal Processing on Interfacial Microstructure for Thin Multilayered Metal Ohmic Contacts to p+-AlGaAs

Author(s):

Publication title:

Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

382

Pub. Year:

1995

Page(from):

431

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992856 [1558992855]

Language:

English

Call no.:

M23500/382

Type:

Conference Proceedings

Details

TDL ID:	ZA00018922
Series ID:	PA00000011
Conf. info. (Name):	Symposium on structure and properties of multilayered thin films
Conf. info. (Number):	1995
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1995.04.17-1995.04.19

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