Beryllium-Based Multilayer Structures | 東京工業大学附属図書館文献データベース

Blank Cover Image

Beryllium-Based Multilayer Structures

Author(s):

Makowiecki, D. M.

Gullikson, E. M.

Kortright, J. B.

Underwood, J. H.

Publication title:

Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

382

Pub. Year:

1995

Page(from):

329

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992856 [1558992855]

Language:

English

Call no.:

M23500/382

Type:

Conference Proceedings

Details

TDL ID:	ZA00018922
Series ID:	PA00000011
Conf. info. (Name):	Symposium on structure and properties of multilayered thin films
Conf. info. (Number):	1995
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1995.04.17-1995.04.19

Similar Items:

1 Conference Proceedings Nonspecular scattering from multilayer mirrors at normal incidence Gullikson,E.M., Stearns,D.G., Gaines,D.P., Underwood,J.H. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Feasibility study of ALS beamline 6.3.2 in the calibration of AXAF: initial reflectivity results Blake, R.L., Burek, A.J., Fitch, J.J., Graessle, D.E., Romaine, S.E., Schwartz, D.A., Soufli, R., Gullikson, E.M., … SPIE
2 Conference Proceedings Optical constants of beryllium from photoabsorption measurements for x-ray optics applications Soufli,R., Bajt,S., Gullikson,E.M. SPIE - The International Society for Optical Engineering	8 Conference Proceedings Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography Bajt,S., Behymer,R.D., Mirkarimi,P.B., Montcalm,C., Wall,M A., Wedowski,M., Folta,J.A. SPIE - The International Society for Optical Engineering
3 Conference Proceedings FABRICATION AND EVALUATION OF TRANSMISSIVE MULTILAYER OPTICS FOR 8 key X-RAYS Bionta, R. M., Jankowski, A. F., Makowiecki, D. M. Materials Research Society	9 Conference Proceedings Ultra-high-accuracy optical testing: creating diffraction-limited short-wavelength optical systems [5900-16] Goldberg, K. A., Naulleau, P. P., Rekawa, S. B., Denham, P. E., Liddle, J. A., Gullikson, E. M., Jackson, K. H., … SPIE - The International Society of Optical Engineering
4 Conference Proceedings Optical constants of materials for multilayer mirror applications in the EUV/soft x-ray region Soufli,R., Gullikson,E.M. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Beamline for measurement and characterization of multilayer optics for EUV lithography Underwood,J.H., Gullikson,E.M. SPIE-The International Society for Optical Engineering
5 Conference Proceedings EUV scattering and flare of 10X projection cameras Gullikson,E.M., Baker,S.L., Bjorkholm,J.E., Bokor,J., Coldberg,K.A., Goldsmith,J.E.M., Montcalm,C., Naulleau,P., … SPIE - The International Society for Optical Engineering	11 Conference Proceedings EXPLORING THE RELATION BETWEEN INTERFACE STRUCTURE & MECHANICAL PROPERTIES IN MULTILAYER MATERIALS Jankowski, A. F., Makowiecki, D. M., McKernan, M. A., Nutt, S. R., Green, K. Materials Research Society
6 Conference Proceedings Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory [5901-24] Soufli, R., Windt, D. L., Robinson, J. C., Baker, S. L., Spiller, E., Dollar, F. J., Aquila, A. L., Gullikson, E. M., … SPIE - The International Society of Optical Engineering	12 Conference Proceedings Multilayer optics for an extreme-ultraviolet lithography tool with 70-nm resolution Soufli,R., Spiller,E.A., Schmidt,M.A., Davidson,J.C., Grabner,R.F., Gullikson,E.M., Kaufmann,B.B., Mrowka,S., … SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12