Photonic Bandgap Formation by Wafer Bonding and Delamination
- Author(s):
Wada, K. Chen, T. Michel, J. Kimerling, L. C. Aga, H. Mitani, K. Abe, T. Suezawa, M. - Publication title:
- III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 535
- Pub. Year:
- 1999
- Page(from):
- 121
- Pub. info.:
- Warrendale, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994416 [1558994416]
- Language:
- English
- Call no.:
- M23500/535
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
Electrochemical Society |
3
Conference Proceedings
Appropriate wafer preparation for thickness uniformity of PACE processed SOI wafers
Electrochemical Society |
9
Conference Proceedings
Electronic-photonic integrated circuits on the CMOS platform (Invited Paper) [6125-02]
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
In-Situ Determination of Si Wafer Contamination Using Photoconductance Decay Measurements*
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Monolithic Si-based technology for optical receiver circuits (Invited Paper)
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
In-Situ Determination of Si Wafer Contamination Using Photoconductance Decay Measurements
Electrochemical Society |