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X-ray Diffuse Scattering Investigation of Defects in Ion-Implanted and Annealed Silicon

Author(s):
Publication title:
Applications of synchrotron radiation techniques to materials science IV : sympoisum held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
524
Pub. Year:
1998
Page(from):
95
Pub. info.:
Warrendale, Penn.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994300 [1558994300]
Language:
English
Call no.:
M23500/524
Type:
Conference Proceedings

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