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Etching of Platinum Thin Films by High Density Ar/Cl2/HBr Plasma

Author(s):
Kim, C-I.
Kim, N-H.
Chang, E-G.
Kwon, K-H.
Yeom, G-Y.
Seo, Y-J.
1 more
Publication title:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
514
Pub. Year:
1998
Page(from):
357
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994201 [1558994203]
Language:
English
Call no.:
M23500/514
Type:
Conference Proceedings

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