Blank Cover Image

Growth, Patterning and Microelectronic Applications of Epitaxial CobaltDisilicide

Author(s):
Mantl, S.
Kappius, L.
Antons, A.
Loken, M.
Klinkhammer, F.
Dolle, M.
Zhao, Q. T.
Mesters, S.
Buchal, Ch.
Bay, H. L.
Kabius, B.
Trinkaus, H.
Heinig, K. H.
8 more
Publication title:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
514
Pub. date:
1998
Page(from):
145
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994201 [1558994203]
Language:
English
Call no.:
M23500/514
Type:
Conference Proceedings

Similar Items:

Klinkhammer, F., Kappius, L., Antons, A., Dolle, M., Trinkaus, H., Mesters, St., Bochem, H-P., Mantl, S., Heinig, K-H.

MRS - Materials Research Society

Kappius, L., Tyagi, A. K., Breuer, U., Bay, H. L., Mantl, S.

MRS - Materials Research Society

Buchal, Ch., Kappius, L., Lipinsky, Th., Loken, M., Mantl, S.

Materials Research Society

Mantl S.

Kluwer Academic Publishers

Mantl, S., Bay, H. L., Michel, I., Mesters, S., Trinkaus, H.

MRS - Materials Research Society

Buchal, Ch., Roelofs, A., Siegert, M., Loken, M.

MRS-Materials Research Society

Dolle, M., Mantl, S., Hacke, M., Mesters, St., Bay, H. L.

MRS - Materials Research Society

10 Conference Proceedings Silicon-Based Optoelectronics

Buchal, Ch., Loken, M., Siegert, M.

MRS - Materials Research Society

Zhao,Q.T., Kappius,L., Mesters,St., Mantl,S.

SPIE - The International Society for Optical Engineering

Buchal, Ch., Mantl, S., Thomas, D. K.

Materials Research Society

Mantl, S., Bay. H. L., Dieker, Ch.

Materials Research Society

M. Luysberg, N. Hueging, D. Buca, H. Trinkaus, S. Mantl

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12