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Recent Improvements in Dry Etching of Hg1-x CdxTe by CH4-Based Electron-Cyclotron-Resonance Plasmas

Author(s):
Publication title:
Infrared applications of semiconductors II : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
484
Pub. Year:
1998
Page(from):
259
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993891 [1558993894]
Language:
English
Call no.:
M23500/484
Type:
Conference Proceedings

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