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Nondestructive and Whole Wafer Characterization of III-V IR Epitaxial Materials Prepared by Turbo Disk Metalorganic Chemical Vapor Deposition

Author(s):
Feng, Z. C.
Pelczynski, M.
Beckham, C.
Cooke, P.
Ferguson, I.
Stall, R. A.
1 more
Publication title:
Infrared applications of semiconductors II : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
484
Pub. Year:
1998
Page(from):
13
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993891 [1558993894]
Language:
English
Call no.:
M23500/484
Type:
Conference Proceedings

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