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Characteristics of Y2O3 Films on Si(100) by Ionized Cluster Beam Deposition

Author(s):
Cho, M. H.
Whangbo, S. W.
Whang, C. N.
Choi, S. C.
Kang, S. B.
Lee, S. I.
Lee, M. Y.
2 more
Publication title:
Epitaxial oxide thin films III : symposium held March 31-April 2, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
474
Pub. Year:
1997
Page(from):
345
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993785 [1558993789]
Language:
English
Call no.:
M23500/474
Type:
Conference Proceedings

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