Blank Cover Image

Crystallization of Si(1-y)Cy Films by Excimer Laser Annealing: Characterization of the Microstructure of the Films

Author(s):
Boher, P.
Stehle, M.
Stehle, J. L.
Fogarassy, E.
Grob, J. J.
Grob, A.
Muller, D.
2 more
Publication title:
Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
452
Pub. Year:
1997
Page(from):
959
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993563 [1558993568]
Language:
English
Call no.:
M23500/452
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Synthesis of high-quality Si1-yCy and Si1-x-yGexCy epitaxial layers on (100)Si by ion implantation and pulsed excimer laser crystallization

Grob,J.-J., Fogarassy,E., Grob,A., Muller,D., Prevot,B., Stuck,R., de Unamuno,S., Boher,P., Stehle,M.X.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Characterization of laser-annealed polysilicon by spectroscopic ellipsometry and comparison to other techniques

Boher,P., Stehle,J.L., Suzuki,Y., Iwasaki,A.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings The growth of Si1-yCy/Si and Si1-x-yGexCy/Si heterostructures by ion implantation and pulsed excimer laser-induced epitaxy

Fogarassy,E., Grob,A., Grob,J.-J., Muller,D., Prevot,B., Stuck,R., Boher,P., Stehle,M.X.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Surface Roughness Characterization of Au Thin Films by Spectroscopic Ellipsometry, Grazing X-ray Reflectance, Light Scattering and Scanning Tunneling Microscopy

Boher, P., Stehle, J. L.

MRS - Materials Research Society
3 Conference Proceedings New process for manufacturing thin SiGe and SiGeC epitaxial films on silicon by ion implantation and excimer laser annealing

Boher,P., Stehle,J.L.P., Piel,J.P., Fogarassy,E.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Structural Characterization of Different Insulating Films by Spectroscopic Ellipsometry and Grazing X-ray Reflectance

Boher, P., Stehle, J. L., Hennet, L.

MRS - Materials Research Society
4 Conference Proceedings Si1-xGexCy FILM FORMATION BY PULSED EXCIMER LASER CRYSTALLIZATION OF HEAVILY Ge AND C IMPLANTED SILICON

Fogarassy, E., Dentel, D., Grob, J. J., Prevot, B., Stoquert, J. P., Stuck, R.

MRS - Materials Research Society
10 Conference Proceedings Single-shot excimer laser annealing:a new tool for poly-AMLCD combined with spectroscopic ellipsometry

Stehle,M.X., Zahorski,D., Stehle,J.L.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Single Shot Excimer Laser Annealing of Amorphous Silicon: Effect of Hydrogen on the Properties of the Polysilicon

Boher, P., Stehle, M., Godard, B., Stehle, J. L.

MRS - Materials Research Society
11 Conference Proceedings Combine Spectroscopic Ellipsometry and Grazing X-ray Reflectance for Fine Characterization of Complex Epitaxial Structures

Boher, P., Stehle, J. L.

MRS - Materials Research Society
6 Conference Proceedings Single-shot excimer laser annealing of PECVD amorphous silicon

Boher,P., Zahorski,D., Prochasson,S., Godard,B., Stehle,J.L., Suzuki,Y., Iwasaki,A.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Combine Spectroscopic Ellipsometry and Grazing X-ray Reflectance for Fine Characterization of Complex Epitaxial Structures

Boher, P., Stehle, J. L.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12