Microstructural Analysis and Modelling of Thin Porous Silicon Layers with Variable Angle Spectroscopic Ellipsometry

Microstructural Analysis and Modelling of Thin Porous Silicon Layers with Variable Angle Spectroscopic Ellipsometry

Author(s):

Publication title:

Microporous and macroporous materials

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

431

Pub. Year:

1996

Page(from):

259

Pub. info.:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993341 [1558993347]

Language:

English

Call no.:

M23500/431

Type:

Conference Proceedings

Details

TDL ID:	ZA00018909
Series ID:	PA00000011
Conf. info. (Name):	Symposium on microporous and macroporous materials
Conf. info. (Number):	1996
Conf. info. (Venue):	San Francisco, California, USA
Conf. info. (Date):	1996.04.08-1996.04.11

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