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Dry Etching of InGaP and AlInP in CH4/H2/Ar

Author(s):
Lee, J. W.
Pearton, S. J.
Santana, C. J.
Lambers, E. S.
Abernathy, C. R.
Hobson, W. S.
Ren, F.
2 more
Publication title:
Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
421
Pub. Year:
1996
Page(from):
315
Pub. info.:
Pittsburgh, Penn: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993242 [155899324X]
Language:
English
Call no.:
M23500/421
Type:
Conference Proceedings

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