ECR Etching of GaP, GaAs, InP, and InGaAs in Cl2/Ar, Cl2/N2, BCl3/Ar, and BCl3/N2
- Author(s):
Shul, R. J. Baca, A. G. Rieger, D. J. Hou, H. Pearton, S. J. Ren, F. - Publication title:
- Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 421
- Pub. Year:
- 1996
- Page(from):
- 245
- Pub. info.:
- Pittsburgh, Penn: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993242 [155899324X]
- Language:
- English
- Call no.:
- M23500/421
- Type:
- Conference Proceedings
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