Blank Cover Image

ECR Etching of GaP, GaAs, InP, and InGaAs in Cl2/Ar, Cl2/N2, BCl3/Ar, and BCl3/N2

Author(s):
Shul, R. J.
Baca, A. G.
Rieger, D. J.
Hou, H.
Pearton, S. J.
Ren, F.
1 more
Publication title:
Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
421
Pub. Year:
1996
Page(from):
245
Pub. info.:
Pittsburgh, Penn: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993242 [155899324X]
Language:
English
Call no.:
M23500/421
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings GaN Etching in BCl3/Cl2 Plasmas

Shul, R. J., Ashby, C. I. H., Willison, C. G., Zhang, L., Han, J., Bridges, M. M., Pearton, S. J., Lee, J. W., Lester, …

MRS - Materials Research Society

Zhang, A. P., Dang, G., Ren, F., Cao, X. A., Cho, H., Lambers, E. S., Pearton, S. J., Shul, R. J., Zhang, L., Baca, A. …

MRS-Materials Research Society

Shul, R. J., Ashby, C. I. H., Rieger, D. J., Howard, A. J., Pearton, S. J., Abernathy, C. R., Vartuli, C. B., Barnes, P. …

MRS - Materials Research Society

Shul, R., Zhang, L, Baca, A., Han, J., Crawford, M., Willison, C., Pearton, S., Ren, F., Zolper, J., Lester, L.

Electrochemical Society

3 Conference Proceedings ECR, ICP and RIE plasma etching of GaN

Shul, R.J., McClellan, G.B., Rieger, D.J., Hafich, M.J., Drummond, T.J., Pearton, S.J., Abernathy, C.R., Constantine, …

Electrochemical Society

Ren, F., Pearton, S.J., Hobson, W.S., Lothian, J.R., Lopata, J., Cole, M.W., Caballero, J.A.

Electrochemical Society

4 Conference Proceedings ICP Etching of GaAs Via Hole Contacts

Shul, R.J., Baca, A.G., Briggs, R.D., McClellan, G.B., Pearton, S.J., Constantine, C.

Electrochemical Society

Ren, F., Hamm, R. A., Wilson, R. G., Pearton, S. J., Lothian, J. R.

MRS - Materials Research Society

Lee, J.W., Pearton, S.J., Lambers, E.S., Mileham, J.R., Abernathy, C.R., Hobson, W.S., Ren, F., Shul, R.J.

Electrochemical Society

Shul, R. J., Zhang, L., Willison, C. G., Han, J., Pearton, S. J., Hong, J., Abernathy, C. R., Lester, L. F.

MRS - Materials Research Society

Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Mileham, J. R., Shul, R. J., Kilcoyne, S. P., Hagerott-Crawford, M., …

MRS - Materials Research Society

Jung, K-B., Lee, J. W., Park, Y. D., Childress, J. R., Pearton, S. J., Ren, F.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12