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Vapor Phase Epitaxy of GaN Using Gallium Tri-Chloride and Ammonia

Author(s):
Yuri, M.
Ueda, T.
Lee, H.
Itoh, K.
Baba, T.
Harris, J. S., Jr.
1 more
Publication title:
Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
421
Pub. Year:
1996
Page(from):
195
Pub. info.:
Pittsburgh, Penn: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993242 [155899324X]
Language:
English
Call no.:
M23500/421
Type:
Conference Proceedings

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