Ti/TiN Barrier Improvement for VLSI Metallization
- Author(s):
- Publication title:
- Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 410
- Pub. Year:
- 1996
- Page(from):
- 31
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993136 [1558993134]
- Language:
- English
- Call no.:
- M23500/410
- Type:
- Conference Proceedings
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