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PULSED LASER DEPOSITION OF ZnO THIN FILMS FOR PIEZOELECTRIC APPLICATIONS

Author(s):
Donovan, E. P.
Horwitz, J. S.
Carosella, C. A.
Auyeung, R. C. Y.
Chrisey, D. B.
Smits, J. G.
1 more
Publication title:
Materials for smart systems : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
360
Pub. Year:
1995
Page(from):
395
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992610 [1558992618]
Language:
English
Call no.:
M23500/360
Type:
Conference Proceedings

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