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HIGH DENSITY MAGNETICALLY CONFINED DRY ETCHING OF METALLIZATION AND DIELECTRICS IN GaAs DEVICE TECHNOLOGY

Author(s):
Pearton, S. J.
Abernathy, C. R.
Ren, F.
Lothian, J. R.
Kopf, R. P.
Katz, A.
1 more
Publication title:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
337
Pub. Year:
1994
Page(from):
749
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992375 [1558992375]
Language:
English
Call no.:
M23500/337
Type:
Conference Proceedings

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