Blank Cover Image

CHEMICAL-MECHANICAL POLISHING OF TUNGSTEN WITH HOLOGEN-BASED SLURRIES

Author(s):
Publication title:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
337
Pub. date:
1994
Page(from):
145
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992375 [1558992375]
Language:
English
Call no.:
M23500/337
Type:
Conference Proceedings

Similar Items:

Kumar, K. S., Murarka, S. P.

MRS - Materials Research Society

Raghunath, C., Lee, K.T., Kneer, E.A., Mathew, V., Raghavan, S.

Electrochemical Society

Neirynck, Jan M., Murarka, S. P., Gutmann, R. J.

MRS - Materials Research Society

Abiade, J.T., Yeruva, S., Moudgil, B., Kumar, D., Singh, R.K.

Materials Research Society

Steigerwald, J. M., Murarka, S. P., Duquette, D. J., Gutmann, R. J.

MRS - Materials Research Society

Golzarian, R., Gonzales, S., Luttzen, J., Sue, L., Wertsching, F.

Materials Research Society

Yang, G-R., Zhao, Y-P., Neirynck, Jan M., Murarka, Shyam P., Gutmann, Ronald J.

MRS - Materials Research Society

Yoon, B.U., Jeong, I.K, Kim, J.Y., Lee, J.W., Hah, S.R., Moon, J.T., Lee, S.I.

Electrochemical Society

Lee, B-C., Duquette, D.J., Gutmann, R.J.

Electrochemical Society

Yen, S.-C., Tasi, T.-H.

Electrochemical Society

Agarwal, P., Bielmann, M., Lolt, D., Mahajan, U., Mischler, S., Rosset, E., Singh, R. K.

Materials Research Society

J.X. Su, J.P. Chen, Q. Li, H.Q. Qin

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12