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Direct bonding between spacer and field emitter array using an electron-beam-evaporated interlayer

Author(s):
Park,H.-W. ( Korea Institute of Science and Technology )
Ju,B.-K.
Lee,Y.-H.
Kang,I.-B.
Samaan,N.D.
Haskard,M.R.
Park,J.-H.
Oh,M.-H.
3 more
Publication title:
Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3046
Pub. Year:
1997
Page(from):
328
Page(to):
335
Pub. info.:
Bellingham: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424594 [0819424595]
Language:
English
Call no.:
P63600/3046
Type:
Conference Proceedings

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