Blank Cover Image

Application of a plastic diaphragm for a silicon micropump

Author(s):
Publication title:
Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3046
Pub. date:
1997
Page(from):
148
Page(to):
155
Pub. info.:
Bellingham: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424594 [0819424595]
Language:
English
Call no.:
P63600/3046
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Computer modeling techniques applied to pneumatically driven micropumps

Kang,I.-B., Samaan,N.D., Haskard,M.R., Kim,N.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings A Study of Hermetic Glass Sealing Using a Modified Direct Bonding Method

Ju, B. K., Ko, C. G., Lee, Y. H., Kang, I. B., White, P., Samaan, N., Haskard, M., Oh, M. H.

MRS - Materials Research Society
2 Conference Proceedings Application of anisotropic conductive films for realization of interconnects in micromechanical structures

Kang,I.-B., Haskard,M.R., Samaan,N.D.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Experimental Analysis of the Process of Anodic Bonding Using an Evaporated Glass Layer

Choi, W. B., Ju, B. K., Lee, Y. H., Haskard, M. R., Jeong, S. J., Lee, N. Y., Sung, M. Y., Oh, M. H.

MRS - Materials Research Society
3 Conference Proceedings Direct bonding between spacer and field emitter array using an electron-beam-evaporated interlayer

Park,H.-W., Ju,B.-K., Lee,Y.-H., Kang,I.-B., Samaan,N.D., Haskard,M.R., Park,J.-H., Oh,M.-H.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Modular exponential accelerator chip based on precomputations for RSA cryptography application

Ramschie,V.W., Hariz,A., Haskard,M.R.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Fabrication of a thick nickel microvalve with truncated pyramid shape

Kang,I.-B., Haskard,M.R., Samaan,N.D., Orders,P.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Low-doped etch stopping for micromechanical device production

Murfett,D.B., Haskard,M.R., Marriage,A.J.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings A Low Temperature Direct Bonding Method Using an Electron-Beam Evaporated Silicon-Oxide Interlayer

Park, H. W., Ju, B. K., Lee, Y. H., Park, J. H., Lee, N. Y., Koh, K. H., Shin, D. K., Kang, I. B., Samaan, N., Haskard, …

MRS - Materials Research Society
11 Conference Proceedings Surface Roughness of Silicon Diaphragm Due to Ionic Contamination During Electrochemical Etching of Silicon

Sooriakumar, K., Pastirik, E.M., Chan, W.K., Schade, M.R.

Electrochemical Society
6 Conference Proceedings Assembly and interconnection technology for micromechanical structures using anisotropic conductive film

Kang,I.-B., Haskard,M.R., Ju,B.K.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Structual optimization of NiTi/Si diaphragm used in micropumps

Wang, L., Chen, J., Xu, D., Cai, B.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12