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Application of a plastic diaphragm for a silicon micropump

Author(s):
Publication title:
Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3046
Pub. date:
1997
Page(from):
148
Page(to):
155
Pub. info.:
Bellingham: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424594 [0819424595]
Language:
English
Call no.:
P63600/3046
Type:
Conference Proceedings

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