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Optical properties of thin films deposited by reactive-Rf-magnetron sputtering

Author(s):
Yoshida,K. ( Osaka Institute of Technology )
Kamimura,T.
Ochi,K.
Kaku,S.
Yoshida,H.
Fujita,H.
Tani,F.
Sunagawa,M.
Okamoto,T.
4 more
Publication title:
Laser-Induced Damage in Optical Materials: 1996
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2966
Pub. date:
1997
Page(from):
225
Page(to):
225
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819423702 [081942370X]
Language:
English
Call no.:
P63600/2966
Type:
Conference Proceedings

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