Optical properties of thin films deposited by reactive-Rf-magnetron sputtering

Optical properties of thin films deposited by reactive-Rf-magnetron sputtering

Author(s):

Yoshida,K. ( Osaka Institute of Technology )

Publication title:

Laser-Induced Damage in Optical Materials: 1996

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2966

Pub. Year:

1997

Page(from):

225

Page(to):

225

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819423702 [081942370X]

Language:

English

Call no.:

P63600/2966

Type:

Conference Proceedings

Details

TDL ID:	ZA00018892
Series ID:	PA00000029
Conf. info. (Name):	Laser Damege : Laser-Induced Damage in Optical Materials
Conf. info. (Number):	1996
Conf. info. (Venue):	Boulder, CO, USA
Conf. info. (Date):	1996.10.07-1996.10.09

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