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Copper metallization for on-chip interconnects

Author(s):
Gelatos,A.V. ( Motorola )
Nguyen,B.-Y.
Perry,K.A.
Marsh,R.
Peschke,J.
Filipiak,S.
Travis,E.O.
Thompson,M.A.
Saaranen,T.
Tobin,P.J.
Mogab,C.J.
6 more
Publication title:
Microelectronic Device and Multilevel Interconnection Technology II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2875
Pub. Year:
1996
Page(from):
346
Page(to):
357
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422736 [0819422738]
Language:
English
Call no.:
P63600/2875
Type:
Conference Proceedings

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