Scalability of conventional and sidewall-sealed LOCOS technology for 256-Mbit DRAM array and periphery isolation
- Author(s):
- Rodder,M. ( Texas Instruments Inc. )
- Hwang,J.M.
- Chen,I.-C.
- Publication title:
- Microelectronic Device and Multilevel Interconnection Technology II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2875
- Pub. Year:
- 1996
- Page(from):
- 236
- Page(to):
- 243
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422736 [0819422738]
- Language:
- English
- Call no.:
- P63600/2875
- Type:
- Conference Proceedings
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