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Study of integration issues in shallow trench isolation for deep submicron CMOS technologies

Author(s):
Chatterjee,A. ( Texas Instruments Inc. )
Mason,M.E.
Joyner,K.
Rogers,D.
Mercer,D.
Kuehne,J.
Esquivel,A.L.
Mei,P.
Murtaza,S.S.
Taylor,K.J.
Ali,I.
Nag,S.
O'Brien,S.
Ashburn,S.
9 more
Publication title:
Microelectronic Device and Multilevel Interconnection Technology II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2875
Pub. date:
1996
Page(from):
39
Page(to):
47
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422736 [0819422738]
Language:
English
Call no.:
P63600/2875
Type:
Conference Proceedings

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