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Arrays of thermal microactuators coupled to micro-optical components

Author(s):
Publication title:
Actuator technology and applications : 7-8 August 1996, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2865
Pub. Year:
1996
Page(from):
74
Page(to):
82
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422538 [0819422533]
Language:
English
Call no.:
P63600/2865
Type:
Conference Proceedings

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