Blank Cover Image

High flux undulator beamline optics for EUV interferometry and photoemission microscopy

Author(s):
Beguiristain,R. ( Lawrence Berkeley National Lab. )
Underwood,J.H.
Koike,M.
Batson,P.J.
Gullikson,E.M.
Jackson,K.
Medecki,H.
Attwood,D.T.
3 more
Publication title:
High Heat Flux Engineering III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2855
Pub. Year:
1996
Page(from):
159
Page(to):
169
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422439 [0819422436]
Language:
English
Call no.:
P63600/2855
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Beamline for metrology of x-ray/EUV optics at the Advances Light Source (Invited Paper)

Underwood,J.H., Gullikson,E.M., Koike,M., Batson,P.J.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Characterization of the accuracy of EUV phase-shifting point diffraction interferometry

Naulleau,P., Goldberg,K.A., Lee,S.H., Chang,C., Bresloff,C.J., Batson,P.J., Attwood,D.T.,Jr., Bokor,J.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Beamline for measurement and characterization of multilayer optics for EUV lithography

Underwood,J.H., Gullikson,E.M.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Recent advances in EUV phase-shifting point diffraction interferometry

Naulleau,P., Goldberg,K.A., Lee,S.H., Chang,C.C., Batson,P.J., Attwood,D.T.,Jr., Bokor,J.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Elastic bending and water cooling strategies for producing high-quality synchrotron radiation mirrors in silicon (Invited Paper)

Underwood,J.H., Batson,P.J., Beguiristain,R., Gullikson,E.M.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings White-light spacial frequency multiplication using soft x rays

M. Wei, E.M. Gullikson, J.H. Underwood, T.K. Gustafson, D.T. Attwood, Jr.

Society of Photo-optical Instrumentation Engineers
4 Conference Proceedings Characterization of an EUV Schwarzschild objective using phase-shifting point diffraction interferometry

Goldberg,K.A., Tejnil,E., Lee,S.H., Medecki,H., Attwood,D.T., Jackson,K.H., Bokor,J.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Actinic detection of EUVL mask blank defects

Jeong,S., Idir,M., Johnson,L.E., Lin,Y., Batson,P.J., Levesque,R., Kearney,P.A., Yan,P., Gullikson,E.M., Underwood,J.H., …

SPIE - The International Society for Optical Engineering
5 Conference Proceedings At-wavelength testing of optics for EUV

K.A. Goldberg, H.R. Beguiristain, J. Bokor, H. Medecki, K. Jackson

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Varied-line-spacing laminar-type holographic grating for the standard soft-x-ray flat-field spectrograph

Koike,M., Namioka,T., Gullikson,E.M., Harada,Y., Ishikawa,S., Imazono,T., Mrowka,S., Miyata,N., Yanagihara,M., …

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Laser-produced plasma-based reflectometer for EUV metrology

Mrowka,S., Underwood,J.H., Gullikson,E.M., Batson,P.J.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Experimental comparison of mechanically ruled and holographically recorded plane varied-line-spacing gratings

Underwood,J.H., Gullikson,E.M., Koike,M., Mrowka,S.J.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12