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MCP-based x-ray collimators for lithography of semiconductor devices

Author(s):
Brunton,A.N. ( Univ.of Leicester )
Lees,J.E.
Fraser,G.W.
Tremsin,A.S.
Feller,W.B.
White,P.L.
1 more
Publication title:
Multilayer and grazing incidence X-ray/EUV optics III : 5-6 August, 1996, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2805
Pub. Year:
1996
Page(from):
212
Page(to):
221
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421937 [0819421936]
Language:
English
Call no.:
P63600/2805
Type:
Conference Proceedings

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