Spherical pinch(soft x ray/EUV)and vacuum spark(soft x ray)for microlithography
- Author(s):
- Zhang,L. ( Advanced Laser and Fusion Technology,Inc. )
- Panarella,E.
- Bielawski,M.
- Chen,H.
- Publication title:
- Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2723
- Pub. Year:
- 1996
- Page(from):
- 278
- Page(to):
- 287
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420992 [0819420999]
- Language:
- English
- Call no.:
- P63600/2723
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Vacuum spark for soft x-rays and the spherical pinch for EUV as point sources for microlithography
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Current Research activities in the field of multilayer for EUV, soft x-ray and x-rays in IPOE [6034-13]
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Characteristics of the x-ray/EUV emission from spherically pinched and vacuum spark sources
Society of Photo-optical Instrumentation Engineers |
8
Conference Proceedings
Fabrication and metrology of diffraction limited soft x-ray optics for the EUV microlithography
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Ultrashort-pulse EUV and soft x-ray sources based on high-harmonic generation: principles and applications (Invited Paper)
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |