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Nanostructuring of laser-deposited thin films

Author(s):
Publication title:
Lasers as tools for manufacturing of durable goods and microelectronics : 19 January-2 February, 1996, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2703
Pub. date:
1996
Vol.:
PartB
Page(from):
458
Page(to):
467
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420770 [0819420778]
Language:
English
Call no.:
P63600/2703
Type:
Conference Proceedings

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