193-nm lithography
- Author(s):
Rothschild,M. ( MIT Lincoln Lab. ) Forte,A.R. Horn,M.W. Kunz,R.R. Palmateer,S.C. Sedlacek,J.H.C. - Publication title:
- Lasers as tools for manufacturing of durable goods and microelectronics : 19 January-2 February, 1996, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2703
- Pub. Year:
- 1996
- Vol.:
- PartB
- Page(from):
- 398
- Page(to):
- 404
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420770 [0819420778]
- Language:
- English
- Call no.:
- P63600/2703
- Type:
- Conference Proceedings
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