Mechanistic studies of chemically amplified resists

Mechanistic studies of chemically amplified resists

Author(s):

Hinsberg, W. ( IBM Research Division, Almaden Research Center )

Publication title:

Organic thin films : structure and applications

Title of ser.:

ACS symposium series

Ser. no.:

695

Pub. Year:

1998

Page(from):

344

Page(to):

359

Pub. info.:

Washington, DC: American Chemical Society

ISSN:

00976156

ISBN:

9780841235649 [0841235643]

Language:

English

Call no.:

A05800/695

Type:

Conference Proceedings

Details

TDL ID:	ZA00018814
Series ID:	PA00000004
Conf. info. (Name):	National Meeting of the American Chemical Society
Conf. info. (Number):	213th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1997.04.13-1997.04.17

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