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Precise micromaterial processing by excimer laser ablation

Author(s):
Uchida,Y. ( (Japan) )
Yamada,J. ( (Japan) )
Higa,S. ( (Japan) )
Kathuria,Y.P. ( (Japan) )
Tsuboi,A. ( (Japan) )
Watanabe,S. ( (Japan) )
Hayashi,N. ( (Japan) )
Furuhashi,H. ( (Japan) )
3 more
Publication title:
International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '96
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3211
Pub. Year:
1997
Page(from):
37
Page(to):
42
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426437 [0819426431]
Language:
English
Call no.:
P63600/3211
Type:
Conference Proceedings

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