DC magnetron-sputtered molybdenum thin films for micromechanical structures

DC magnetron-sputtered molybdenum thin films for micromechanical structures

Author(s):

Kwok,C.Y. ( Univ.of New South Wales (Australia) )
Puzzer,T. ( Univ.of New South Wales (Australia) )
Lin,K.M. ( Mosel-Vitelic (Taiwan) )
Haji-Babaei,J. ( Univ.of New South Wales (Australia) )

Publication title:

Smart materials, structures, and integrated systems : 11-13 December 1997, Adelaide, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3241

Pub. Year:

1997

Page(from):

143

Page(to):

150

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426796 [0819426792]

Language:

English

Call no.:

P63600/3241

Type:

Conference Proceedings

Details

TDL ID:	ZA00018786
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Smart materials, structures, and integrated systems
Conf. info. (Number):	1997
Conf. info. (Venue):	Adelaide, Australia
Conf. info. (Date):	1997.12.11-1997.12.13

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