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Investigation of Copper Gettering Using Radio Isotope and Step-Etching Method in Hydrogen-Annealed and PBS,BSD Treated Silicon Wafers

Author(s):
Publication title:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3322
Pub. Year:
1997
Page(from):
412
Page(to):
418
Pub. info.:
Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427656 [0819427659]
Language:
English
Call no.:
P63600/3322
Type:
Conference Proceedings

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