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Non-Contact Characterization of Ultrathin Dielectrics for the Gigabit Era*

Author(s):
Roy,P.K.
Chacon,C.
Ma,Y.
Kizilyalli,I.C.
Horner,G.S.
Verkuil,R.L.
Miller,T.G.
2 more
Publication title:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3322
Pub. date:
1997
Page(from):
280
Page(to):
294
Pub. info.:
Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427656 [0819427659]
Language:
English
Call no.:
P63600/3322
Type:
Conference Proceedings

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