Characterization Challenges for the ULSI Era*
- Author(s):
- Shaffner,T.J.
- Publication title:
- Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3322
- Pub. Year:
- 1997
- Page(from):
- 1
- Page(to):
- 15
- Pub. info.:
- Pennington, NJ: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427656 [0819427659]
- Language:
- English
- Call no.:
- P63600/3322
- Type:
- Conference Proceedings
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