Implementation of a closed-loop CD and overlay controller for sub-0.25-ヲフm patterning
- Author(s):
Sturtevant,J.L. ( Motorola ) Weilemann,M.R. ( Motorola ) Green,K.G. ( Motorola ) Dwyer,J. ( Motorola ) Robertson,E. ( Motorola ) Hershey,R.R. ( Motorola ) - Publication title:
- Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3332
- Pub. Year:
- 1998
- Page(from):
- 461
- Page(to):
- 470
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427779 [0819427772]
- Language:
- English
- Call no.:
- P63600/3332
- Type:
- Conference Proceedings
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