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Implementation of a closed-loop CD and overlay controller for sub-0.25-ヲフm patterning

Author(s):
Sturtevant,J.L. ( Motorola )
Weilemann,M.R. ( Motorola )
Green,K.G. ( Motorola )
Dwyer,J. ( Motorola )
Robertson,E. ( Motorola )
Hershey,R.R. ( Motorola )
1 more
Publication title:
Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3332
Pub. date:
1998
Page(from):
461
Page(to):
470
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427779 [0819427772]
Language:
English
Call no.:
P63600/3332
Type:
Conference Proceedings

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