Optimal sampling strategies for sub-100-nm overlay
- Author(s):
- Rangarajan,B. ( Advanced Micro Devices,Inc. )
- Templeton,M.K. ( Advanced Micro Devices,Inc. )
- Capodieci,L. ( Advanced Micro Devices,Inc. )
- Subramanian,R. ( Advanced Micro Devices,Inc. )
- Scranton,A. ( Michigan State Univ. )
- Publication title:
- Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3332
- Pub. Year:
- 1998
- Page(from):
- 348
- Page(to):
- 359
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427779 [0819427772]
- Language:
- English
- Call no.:
- P63600/3332
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Characterizing acid mobility in chemically amplified resists via spectroscopic methods
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Effect of viscosity on the rate of photosensitization of diaryliodonium salts by anthracene
American Chemical Society |
2
Conference Proceedings
Spectroscopic characterization of acid mobility in chemically amplified resists
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Practical approach for AAPSM image imbalance correction for sub-100-nm lithography
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
High order correction and sampling strategy for 45nm immersion lithography overlay control
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |