Blank Cover Image

Toward a unified advanced CD-SEM specification for sub-0.18-ヲフm technology

Author(s):
Allgair,J. ( Motorola )
Archie,C.N. ( IBM Corp. )
Banke,W. ( IBM Corp. )
Bogardus,H. ( SEMATECH )
Griffith,J.E. ( Lucent Technologies/Bell Labs. )
Marchman,H.M. ( Texas Instruments Inc. )
Postek,M.T. ( National Institute of Standards and Technology )
Saraf,L.H. ( SEMATECH )
Schlesinger,J.E. ( Texas Instruments Inc. )
Singh,B. ( Advanced Micro Devices,Inc. )
Sullivan,N.T. ( Digital Equipment Corp. )
Trimble,L.E. ( Lucent Technologies/Bell Labs. )
Vladar,A.E. ( Hewlett-Packard Co. )
Yanof,A.W. ( Motorola )
9 more
Publication title:
Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3332
Pub. Year:
1998
Page(from):
138
Page(to):
150
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427779 [0819427772]
Language:
English
Call no.:
P63600/3332
Type:
Conference Proceedings

Similar Items:

Deleporte,A.G., Allgair,J., Archie,C.N., Banke,G.W., Postek,M.T., Schlesinger,J.E., Vladar,A.E., Yanof,A.W.

SPIE - The International Society for Optical Engineering

Fritze,M., Wyatt,P.W., Astolfi,D.K., Davis,P., Curtis,A.V., Preble,D.M., Cann,S.G., Denault,S., Chan,D., Shaw,J.C., …

SPIE - The International Society for Optical Engineering

Deleporte,A.G., Allgair,J., Archie,C.N., Banke,G.W., Postek,M.T., Schlesinger,J.E., Vladar,A.E., Yanof,A.W.

SPIE-The International Society for Optical Engineering

Postek,M.T., Vladar,A.E.

SPIE-The International Society for Optical Engineering

A. E. Vladár, K. P. Purushotham, M. T. Postek

Society of Photo-optical Instrumentation Engineers

Mayer, J.A., Huizenga, K.J., Solecky, E.P., Archie, C.N., Banke, G.W. Jr.,, Cogley, R.M., Nathan, C., Robert, J.M.

SPIE-The International Society for Optical Engineering

Sendelbach, M., Archie, C.N., Banke, B., Mayer, J., Nii, H., Herrera, P., Hankinson, M.

SPIE - The International Society of Optical Engineering

Sturtevant,J.L., Allgair,J., Fu,C.-C., Green,K.G., Hershey,R.R., Kling,M.E., Litt,L.C., Lucas,K.D., Roman,B.J., …

SPIE - The International Society for Optical Engineering

Archie,C.N., Solecky,E.P., Hayes,T.S., Banke,G.W.

SPIE-The International Society for Optical Engineering

Damazo,B.N., Vladar,A.E., Ling,A.V., Donmez,M., Postek,M.T., Jayewardene,E.C.

SPIE-The International Society for Optical Engineering

Monahan,K.M., Forcier,R.A., Ng,W., Kudallur,S., Sewell,H., Marchman,H.M., Schlesinger,J.E.

SPIE-The International Society for Optical Engineering

Vladar, A. E., Radi, Z., Postek, M. T., Kavuri, P. P.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12