Measuring the size and intensity distribution of SEM beam spot
- Author(s):
- Goldenshtein,A. ( Applied Materials,Inc./Opal (Israel) )
- Gold,Y.I. ( Applied Materials,Inc./Opal (Israel) )
- Chayet,H. ( Applied Materials,Inc./Opal (Israel) )
- Publication title:
- Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3332
- Pub. Year:
- 1998
- Page(from):
- 132
- Page(to):
- 137
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427779 [0819427772]
- Language:
- English
- Call no.:
- P63600/3332
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Techniques for measuring the spectrums of the statistical distribution of scintillation, spread, spot dancing and their applications in remote sensing
Society of Photo-optical Instrumentation Engineers |
2
Conference Proceedings
High-power laser beam and focus transverse intensity distribution measuring instrument
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
744e. Precise Tailoring of the Crystal Size Distribution by Optimal Seeding Time Profiles
American Institute of Chemical Engineers |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
10
Conference Proceedings
Investigation of a method for the determination of the focused spot size of industrial laser beams based on the drilling of holes in Mylar film
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Measuring Size-dependent Mechanical Properties of Electrospun Polystyrene Fibers Using In-situ AFM-SEM
Materials Research Society |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Improvement of beam-adjustment accuracy by beam-intensity distribution measurement of a second shaping aperture in electron-beam writing systems
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |