Measuring the size and intensity distribution of SEM beam spot

Author(s):

• Goldenshtein,A. ( Applied Materials,Inc./Opal (Israel) )
• Gold,Y.I. ( Applied Materials,Inc./Opal (Israel) )
• Chayet,H. ( Applied Materials,Inc./Opal (Israel) )

Publication title:

Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3332

Pub. Year:

1998

Page(from):

132

Page(to):

137

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427779 [0819427772]

Language:

English

Call no.:

P63600/3332

Type:

Conference Proceedings