Improving the optical performance of etched silicon gratings

Improving the optical performance of etched silicon gratings

Author(s):

Kuzmenko,P.J. ( Lawrence Livermore National Lab. )
Ciarlo,D.R. ( Lawrence Livermore National Lab. )

Publication title:

Infrared astronomical instrumentation : 23-25 March 1998, Kona, Hawaii

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3354

Pub. Year:

1998

Vol.:

Part 1

Page(from):

357

Page(to):

367

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819428011 [0819428019]

Language:

English

Call no.:

P63600/3354

Type:

Conference Proceedings

Details

TDL ID:	ZA00018775
Series ID:	PA00000029
Conf. info. (Name):	Astronomical Telescopes and Instrumentation : Infrared astronomical instrumentation
Conf. info. (Number):	1998
Conf. info. (Venue):	Kona, HI, USA
Conf. info. (Date):	1998.03.23-1998.03.25

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