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Transport limitations in electrodeposition for LIGA microdevice fabrication

Author(s):
Griffiths,S.K. ( Sandia National Labs. )
Nilson,R.H. ( Sandia National Labs. )
Bradshaw,R.W. ( Sandia National Labs. )
Ting,A. ( Sandia National Labs. )
Bonivert,O. ( Sandia National Labs. )
Hachmann,J.T. ( Sandia National Labs. )
Hruby,J.M. ( Sandia National Labs. )
2 more
Publication title:
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3511
Pub. Year:
1998
Page(from):
364
Page(to):
375
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429704 [0819429708]
Language:
English
Call no.:
P63600/3511
Type:
Conference Proceedings

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