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PMMA microstructure as KrF excimer-laser LIGA material

Author(s):
Yang,C.R. ( Precision Instrument Development Ctr. (Taiwan) )
Chou,B.C.S. ( Precision Instrument Development Ctr. (Taiwan) )
Chou,E.H.Y. ( Precision Instrument Development Ctr. (Taiwan) )
Lin,F.H.H. ( Precision Instrument Development Ctr. (Taiwan) )
Kuo,W.K. ( Precision Instrument Development Ctr. (Taiwan) )
Luo,R.K.S. ( Precision Instrument Development Ctr. (Taiwan) )
Chang,J.W. ( Precision Instrument Development Ctr. (Taiwan) )
Wei,Z.J. ( National Tsing Hua Univ.(Taiwan) )
3 more
Publication title:
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3511
Pub. Year:
1998
Page(from):
342
Page(to):
348
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429704 [0819429708]
Language:
English
Call no.:
P63600/3511
Type:
Conference Proceedings

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