Blank Cover Image

Control and modeling of stress in multistacked polysilicon films considering oxidation effect

Author(s):
Lee,C.S. ( Electronics and Telecommunications Research Institute (Korea) )
Jang,W.I. ( Electronics and Telecommunications Research Institute (Korea) )
Choi,C.A. ( Electronics and Telecommunications Research Institute (Korea) )
Hong,Y.S. ( Electronics and Telecommunications Research Institute (Korea) )
Lee,J.H. ( Electronics and Telecommunications Research Institute (Korea) )
No,K. ( Korea Advanced Institute of Science and Technology )
Wee,D.M. ( Korea Advanced Institute of Science and Technology )
2 more
Publication title:
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3511
Pub. Year:
1998
Page(from):
315
Page(to):
324
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429704 [0819429708]
Language:
English
Call no.:
P63600/3511
Type:
Conference Proceedings

Similar Items:

Choi,C.-A., Lee,C.-S., jang,W.-1., Lee,J.-H., Shon,B.K.

SPIE - The International Society for Optical Engineering

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Kim,Y.T.

SPIE-The International Society for Optical Engineering

Jang,W.I., Choi,C.A., Lee,C.S., Hong,Y.S., Lee,J.H., Baek,J.T., Kim,B.W.

SPIE-The International Society for Optical Engineering

Lim, J.H., Son, B.H., Nam, S.C., Cho, W.I., Yoon, Y.S.

Electrochemical Society

Jang,W.I., Choi,C.A., Hong,Y.S., Jun,C.H., Kim,Y.T., Lee,J.H.

SPIE - The International Society for Optical Engineering

Jang,W.I., Lee,Y.I., Choi,C.A., Jun,C.H., Kim,Y.T.

SPIE - The International Society for Optical Engineering

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Joo,J.W.

SPIE - The International Society for Optical Engineering

Jang,W.-I., Choi,C.-A., Lee,C.-S., Hong,Y.-S., Lee,J.-H.

SPIE - The International Society for Optical Engineering

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Kim,K.

SPIE - The International Society for Optical Engineering

Choi, D.C., Choi, B.D., Jung, J.Y., Park, H.H., Seo, J.W., Lee, K.Y., Chung, H.K.

Materials Research Society

Choi,C.-A., Jang,W.-I., Lee,M.-L., Kim,Y.T.

SPIE-The International Society for Optical Engineering

12 Conference Proceedings High Performance a-Si:H(:Cl) TFT

Kim, S.K., Lee, K.S., Choi, J.H., Kim, C.S., Jang, J.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12