Thin Teflon-like films for MEMS: film properties and reliability studies

Thin Teflon-like films for MEMS: film properties and reliability studies

Author(s):

Smith,B.K. ( Sandia National Labs. )
Brown,C.D. ( Intel Corp. )
LaVigne,G. ( Sandia National Labs. )
Sniegowski,J.J. ( Sandia National Labs. )

Publication title:

Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3511

Pub. Year:

1998

Page(from):

114

Page(to):

124

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429704 [0819429708]

Language:

English

Call no.:

P63600/3511

Type:

Conference Proceedings

Details

TDL ID:	ZA00018768
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
Conf. info. (Number):	1998 : 4th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.09.21-1998.09.22

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