Galvanic etching of silicon
- Author(s):
- Ashruf,C.M.A. ( Deift Univ.of Technology (Netherlands) )
- French,P.J. ( Deift Univ.of Technology (Netherlands) )
- Sarro,P.M. ( Deift Univ.of Technology (Netherlands) )
- Kelly,J.J. ( Utrecht Univ.(Netherlands) )
- Publication title:
- Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3511
- Pub. Year:
- 1998
- Page(from):
- 82
- Page(to):
- 87
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429704 [0819429708]
- Language:
- English
- Call no.:
- P63600/3511
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Trading efficiency for effectiveness in similarity-based indexing for image databases
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
10
Conference Proceedings
System for indexing multispectral satellite images for efficient content-based retrieval
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Fabrication of 3-D Structure on P-Type Silicon Using Electrochemical Etching
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Equilibrium Geometries and Electronic Structure of Oxygen Related Defects in Silicon
Trans Tech Publications |