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Fabrication of binary microlens array by excimer laser micromachining

Author(s):
Lin,F.H.H. ( Precision Instrument Development Ctr. (Taiwan) and National Chiao Tung Univ.(Taiwan) )
Huang,J.H. ( National Chiao Tung Univ.(Taiwan) )
Chou,E.H.Y. ( Precision Instrument Development Ctr.(Taiwan) )
Yang,C.R. ( Precision Instrument Development Ctr.(Taiwan) )
Chou,B.C.S. ( Precision Instrument Development Ctr.(Taiwan) )
Luo,R.K.S. ( Precision Instrument Development Ctr.(Taiwan) )
Kuo,W.K. ( Precision Instrument Development Ctr.(Taiwan) )
Chang,J.W. ( Precision Instrument Development Ctr.(Taiwan) )
Lu,M.H. ( National Chiao Tung Univ.(Taiwan) )
Huang,W.H. ( Precision Instrument Development Ctr. (Taiwan) )
Chen,C.J. ( Precision Instrument Development Ctr. (Taiwan) )
6 more
Publication title:
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3511
Pub. Year:
1998
Page(from):
67
Page(to):
72
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429704 [0819429708]
Language:
English
Call no.:
P63600/3511
Type:
Conference Proceedings

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