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Rapid annealing of ion implanted silicon structures using a radiant light source

Author(s):
  • Harrison, H.B. ( Department of Communication and Electronic Engineering, Royal Melbourne Institute of Technology )
  • Grigg, M. ( Department of Communication and Electronic Engineering, Royal Melbourne Institute of Technology )
  • Short, K.T. ( Department of Communication and Electronic Engineering, Royal Melbourne Institute of Technology )
  • Williams, J.S. ( Department of Communication and Electronic Engineering, Royal Melbourne Institute of Technology )
  • Zylewicz, A. ( Department of Communication and Electronic Engineering, Royal Melbourne Institute of Technology )
Publication title:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
4
Pub. Year:
1982
Page(from):
771
Page(to):
776
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
Language:
English
Call no.:
M23500/4
Type:
Conference Proceedings

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