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Characterization of ion-implanted Si rapidly annealed with incoherent light

Author(s):
Benton, J.L. ( Bell Laboratories )
Celler, G.K. ( Bell Laboratories )
Jacobson, D.C. ( Bell Laboratories )
Kimerling, L.C. ( Bell Laboratories )
Lischner, D.J. ( Bell Laboratories )
Miller, G.L. ( Bell Laboratories )
Robinson, Mc.D. ( Bell Laboratories )
2 more
Publication title:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
4
Pub. Year:
1982
Page(from):
765
Page(to):
770
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
Language:
English
Call no.:
M23500/4
Type:
Conference Proceedings

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